RESOURCES

Practical Information
for Real-World Ionization

Training materials, technical references, and practical guidance to help you better understand, evaluate, and maintain air ionization in cleanroom and manufacturing environments.

Module 1: Why Static MattersModule 2: Understanding Air IonizationModule 3: Air Ionization in Practice
AIR IONIZATION GUIDES

Practical Guides to Air Ionization

Guardian has developed a three-part reference series covering static electricity, air ionization fundamentals, and practical considerations for inspection, testing, and maintenance. These materials reflect our field experience and are intended to support a better understanding of air ionization in semiconductor manufacturing.

1

Why Static
Matters

Static electricity, electrostatic risk, and layered controls.

2

Understanding
Air Ionization

Ionization principles, technologies, and application considerations.

3

Air Ionization
in Practice

Inspection, testing, adjustment, performance evaluation, and troubleshooting.

TECHNICAL REFERENCES

Standards, Testing and
Data Interpretation

Resources to help you understand applicable industry standards, charged-plate test methods, and how Guardian evaluates and documents ionization performance and electrostatic conditions.

ANSI/ESD S20.20ESD control program requirements
ANSI/ESD STM3.1(IEC 61340-4-7)
Ionization test methods
ANSI/ESD SP3.3Periodic verification
of air ionizers

Understanding Applicable Standards

An overview of standards and test methods commonly associated with air-ionization evaluation and periodic verification, with emphasis on their practical application.

Charged plate monitor test equipment

Charged Plate Monitor Testing

How the CPM works, what it measures, our test setup and methods, and how to interpret results.

Examples of ionizer verification and electrostatic field survey reporting

Periodic Verification & ESF Surveys

Overviews of periodic verification and electrostatic field surveys, including test methods, site criteria, and example reporting.